JPH01125362U - - Google Patents
Info
- Publication number
- JPH01125362U JPH01125362U JP2225888U JP2225888U JPH01125362U JP H01125362 U JPH01125362 U JP H01125362U JP 2225888 U JP2225888 U JP 2225888U JP 2225888 U JP2225888 U JP 2225888U JP H01125362 U JPH01125362 U JP H01125362U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- substrate holder
- holding member
- substrate
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022258U JPH0519330Y2 (en]) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022258U JPH0519330Y2 (en]) | 1988-02-22 | 1988-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01125362U true JPH01125362U (en]) | 1989-08-25 |
| JPH0519330Y2 JPH0519330Y2 (en]) | 1993-05-21 |
Family
ID=31240212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988022258U Expired - Lifetime JPH0519330Y2 (en]) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519330Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5324915A (en) * | 1976-06-09 | 1978-03-08 | Motoren Werke Mannheim Ag | Exhaust piping for turbo supercharged internal combustion engine |
| JPS57111031A (en) * | 1980-12-27 | 1982-07-10 | Clarion Co Ltd | Sputtering device |
-
1988
- 1988-02-22 JP JP1988022258U patent/JPH0519330Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5324915A (en) * | 1976-06-09 | 1978-03-08 | Motoren Werke Mannheim Ag | Exhaust piping for turbo supercharged internal combustion engine |
| JPS57111031A (en) * | 1980-12-27 | 1982-07-10 | Clarion Co Ltd | Sputtering device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519330Y2 (en]) | 1993-05-21 |